Quantitative Microbeam Analysis provides a comprehensive introduction to the field of quantitative microbeam analysis (MQA). MQA is a technique used to analyze subatomic quantities of materials blasted from a surface by a laser or particle beam, providing information on the structure and composition of the material. Contributed to by international experts, the book is unique in the breadth of microbeam analytical techniques covered. For each technique, it develops the theoretical background, discusses practical details relating to choice of equipment, and describes the current advances. The book highlights developments relating to Auger electron spectroscopy in scanning electron microscopes and transmission electron microscopes and advances in surface analytical imaging and accelerated ion beam-surface interactions.